This technique demonstrates a new gas sensor array (I+NOSE) not only compatible to the IC fabrication process but also provides several advantages over traditional MOS gas sensor. The most sensitive region of the silicon nanoelectronic devices on the gas sensor chip is to grow different gas sensor materials via ALD to form an array of gas sensors. Self-calibration of temperature, humidity and other interfering gases (H2 in this case), solves problems like cross-sensitivity, quantification, specificity and sensitivity that traditional gas sensors suffered. In gas sensing, each nanoelectronic device is also worked under device localized Joule heating, as a result of the very small heating mass, the power consumption can be effectively reduced during gas sensing to microWatts/device, solving the current high power consumption problem of gas sensors. We integrated the sensing chip with readout circuitry as a dongle and demonstrated CO detection under interference on the smart phone (Figure 1). Table 1 shows a comparison of I+NOSE with tier 1 suppliers in the market on CO detection
Integration of the sensing chip (I+NOSE) with readout circuitry as a dongle and demonstration of CO detection under H2 interference on the smart phone (Figure 1)
A comparison of sensor properties on CO detection with tier 1 suppliers.